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Trifluoromethane | CHF3
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Trifluoromethane | CHF3
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Purity
99.999% Min
Molecular Formula
CHF3
Product Usage
Trifluoromethane is used in the semiconductor industry in plasma etching of silicon oxide and silicon nitride.
Packaging Available
40L, 43.3L
Valve Available
CGA660, DISS716
CONTACT US
FluorLink Holding Limited
2/F Mega Cube, No.8 Wang Kwong Road, Kowloon Bay, KLN, Hong Kong
No. 244, Tongpu Road, Qujiang, Quzhou, Zhejiang, China Tel: +852 3906 8506
Fax: +852 3906 8540
E-mail: info@fluorlink.com
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