Trifluoromethane | CHF3

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Purity 99.999% Min

Molecular Formula CHF3

Product Usage Trifluoromethane is used in the semiconductor industry in plasma etching of silicon oxide and silicon nitride.

Packaging Available 40L, 43.3L

Valve Available CGA660, DISS716

FluorLink Holding Limited

2/F Mega Cube, No.8 Wang Kwong Road, Kowloon Bay, KLN, Hong Kong

No. 244, Tongpu Road, Qujiang, Quzhou, Zhejiang, China Tel: +852 3906 8506

Fax: +852 3906 8540

E-mail: info@fluorlink.com

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